In general, MEMS accelerometers fabrication relies more on trial and error than on clear design principles. Since the trial and error basis fabrication and testing of a MEMS are extremely costly, comprehensive modeling and simulation can be valuable tool to evaluate different designs and perform parametric studies each MEMS design before actual fabrication. This paper presents work done for SOI Mumps based capacitive accelerometer for health monitoring system and its reduction for the finite element simulation purpose in Coventorware. Reduction of structure for pull in voltage analysis by reducing the structure has been done. System level simulation is efficient in time but finite element method is needed for accuracy. Here the reduction of model needed as the structure is of thousand microns and its parts are of few microns, simulation of which is costly in computation time and resource needed.

1. Mistry KK, Swamy KBM, Sen S (2010), "Design of an SOI MEMS high resolution capacitive type single axis accelerometer", MicrosystemTtechnology, vol 16 (12), springer verlag.
2. SOI- MUMPs Handbook, revision 8, Memscap.
3. Kanchan Sharma, et al. "Design optimization of MEMS Comb Accelerometer," ASEE1 2008,Deartment of Electrical and Computer Engineering,University of Bridgeport, Bridgeport.
4. Choudhary S, et al. , (2005) " A comparison of pull in voltage calculation methods for MEMS based electrostatic actuator design", International conference on Sensing Technology, Newzealand.
5. Flores ES,et al. (2003), " Study of pull in voltage for MEMS parallel plate capacitor actuators",MRS Materials Research Society Fall Meeting, Boston.
6. B. D. Pant,et al. , oct 2009, "Design of MEMS Capacitive Comb drive Accelerometer with sag optimization", Sensor and Transducers,vol. 109.
7. Gerold S (1997), "Fabrication of a new highly-symmetrical, in-plane accelerometer structure by anisotropic etching of (100) silicon", Journal of Micromechanics and Microengineering, vol 7, pp 71 -78.
8. Bustillo J, Howe R, Muller R (1998), "Surface micromaching for micro-electromechanical systems" IEEE, vol 86, pp 1552-1574.
9. Farhani H, Mills JK and Cleghorn WL (2009), "Design, fabrication and analysis of micromachined high sensitivity and 0% cross axis sensitivity capacitive accelerometers", Microsystem technologies, vol 15, pp 1815-1826.
10. Bao M, "Analysis and Design Principle of MEMS devices", Elsevier (2005).
11. Senturia SD (2002), " Microsystem Design", Kluwer academic publishers. Albarbar A, Badri A, Sinha J & Starr A (2009), "Performance evaluation of MEMS accelerometers Measurement", Journal of the International Measurement Confederation, vol 42 (5), pp 790-795

Accelerometer Capacitive Coventorware Comb type FEM MEMS SOI Pull in Voltage