The acronym MEMS is used almost universally to refer to all devices that are produced by micro fabrication or micromachining except integrated circuit (IC). Micro machining is any process that deposits, etches, or defines materials with minimum features measured in micrometers or less. Micro-switches are essentially micro-cantilevers that are fixed at both ends. They are mainly used in MEMS applications such as filters and switches. The main stiffness of a fixed-fixed constant rectangular cross-section is the one relating to z-translation (bending about the y-axis) and is formulated at the midpoint of the switch. The work presented in this paper involves design and simulation of MEMS switches. The devices consist of different dimensions micro-switches varying length from 300um to 500um with three different widths (20um to 40um). The work focuses on the realization of electrostatic low actuation switches with main emphasis on the pull-in voltage and RF response.

1. G. M. Rebeiz, "RF MEMS Theory, Design, and Technology", John Wiley & Sons, Inc. , New York, NY, 2003.
2. Tai-Ran Hsu, "MEMS & MICROSYSTEMS DESIGN AND MANUFACTURE", Tata McGraw Hill Publications, 2002
3. WichtTechnologie Consulting (WTC), "The RF MEMS Market 2002-2007:Analysis, Forecasts and Technology Review," http://www. wtc-consult. de, 2002
4. J. W. Judy, "Microelectromechanical systems (MEMS): Fabrication, design and applications, Smart Materials and Structures", vol. 10, pp. 1115-1134, 2001
5. Coventor, Inc. ," Pull-in analysis of Electrostatically –Actuated Beams Verifying Accuracy of CoventorBehavioralModels",Available. [Online]. http://www. coventor. com/media/fem_comparisions/pullin_voltage. pdf.
6. J. W. Judy, "Microelectromechanical systems (MEMS): Fabrication, design andapplications, Smart Materials and Structures", vol. 10, pp. 1115-1134, 2001 [7 ]L. P. B. Katehi, J. F. Harvey, and E. Brown, "MEMS and Si micromachinedcircuits for high-frequency applications," IEEE Trans. Microw. Theory Tech. , vol. 50, no. 3, pp. 858–866, Mar. 2002.
7. K. J. Herrick, J. G. Yook, and L. P. B. Katehi, "Microtechnology inthe development of three-dimensional circuits," IEEE Trans. Microw. Theory Tech. , vol. 46, no. 11, pp. 1832–1844, Nov. 1998.
8. Pamidighantam S, Puers R, Baert K and Tilmans H A C 2002, "Pull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed and fixed-free end conditions". J. Micromech. Microeng. 12 458-64
9. Cheng J, Zhe J and Wu X "Analytical and finite element model pull-in study of rigid and deformable electrostatic microactuators ". J. Micromech. Microeng. Vol. 14, pp. 57-68, 2004
10. S. D. Senturia, "Microsystems Design", Kluwer Academic Publisher, Boston, pp. 249-259, 2000
11. Pons-nin, A. Rodriguez, and L. M. castaner, " Volatge and Pull-in in Current Drive of Electrostatic actuators". Journal of Microelectromechanical systems, Vol. 11,No. 3, pp. 196-205, Jun 2002.
12. S. Afrang et al, "Design and Simulation of Simple and Varying Section Cantileverand Fixed-Fixed End Types MEMS Switches, Proceeding of ICSE , pp. 593-596,2004
13. Coventor, Inc. ," Pull-in analysis of Electrostatically –Actuated Beams VerifyingAccuracy of CoventorBehavioral Models", Available. [Online]. http://www. coventor. com/mediA/fem_comparisions/pullin_voltage. pdf.
14. CoventorWare version 2001. 3. Reference Guides and Tutorials
15. CoventorWare, MEMS Design Software, version 2004,http://www. coventor. com, CoventorWare, 2004
16. www. memscap. com/memsrus/docs/Polymump s. dr. v10. pdf
17. MEMSCAP Inc. , http://www. memscap. com
18. www. mems. ece. ufl. edu
19. http://titan. me. jhu. edu/

Rf Mems Mumps Memscap Fem