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Design Optimization of Capacitive MEMS Accelerometer for Improved Sensitivity

Published on September 2016 by Keya Sanyal, Kalyan Biswas
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International Conference on Emerging Trends in Informatics and Communication
Foundation of Computer Science USA
ICETIC2016 - Number 1
September 2016
Authors: Keya Sanyal, Kalyan Biswas
8e8bedda-d3df-4db1-bdd1-8317f308ec14

Keya Sanyal, Kalyan Biswas . Design Optimization of Capacitive MEMS Accelerometer for Improved Sensitivity. International Conference on Emerging Trends in Informatics and Communication. ICETIC2016, 1 (September 2016), 11-14.

@article{
author = { Keya Sanyal, Kalyan Biswas },
title = { Design Optimization of Capacitive MEMS Accelerometer for Improved Sensitivity },
journal = { International Conference on Emerging Trends in Informatics and Communication },
issue_date = { September 2016 },
volume = { ICETIC2016 },
number = { 1 },
month = { September },
year = { 2016 },
issn = 0975-8887,
pages = { 11-14 },
numpages = 4,
url = { /proceedings/icetic2016/number1/25868-4007/ },
publisher = {Foundation of Computer Science (FCS), NY, USA},
address = {New York, USA}
}
%0 Proceeding Article
%1 International Conference on Emerging Trends in Informatics and Communication
%A Keya Sanyal
%A Kalyan Biswas
%T Design Optimization of Capacitive MEMS Accelerometer for Improved Sensitivity
%J International Conference on Emerging Trends in Informatics and Communication
%@ 0975-8887
%V ICETIC2016
%N 1
%P 11-14
%D 2016
%I International Journal of Computer Applications
Abstract

In this paper design of a two-axis capacitive accelerometer is described. Variation of capacitance of the device with applied acceleration as well as sensitivity of the device is analyzed. The performance analysis of the device is done using ANSYS Multyphysics software. From the analysis results, a capacitive mems accelerometer with enhanced sensitivity has been proposed. The sensitivity of the accelerometer has efficiently been enhanced with the increase of beam length and reduction beam width.

References
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Index Terms

Computer Science
Information Sciences

Keywords

Mems Sensors Capacitive Accelerometer Sensitivity