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Design and Simulation of MEMS Capacitive Pressure Sensor Array for Wide Range Pressure Measurement

by Kirankumar B. Balavalad, B. G. Sheeparamatti, Veekshit B. Math
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International Journal of Computer Applications
Foundation of Computer Science (FCS), NY, USA
Volume 163 - Number 6
Year of Publication: 2017
Authors: Kirankumar B. Balavalad, B. G. Sheeparamatti, Veekshit B. Math
10.5120/ijca2017913554

Kirankumar B. Balavalad, B. G. Sheeparamatti, Veekshit B. Math . Design and Simulation of MEMS Capacitive Pressure Sensor Array for Wide Range Pressure Measurement. International Journal of Computer Applications. 163, 6 ( Apr 2017), 39-46. DOI=10.5120/ijca2017913554

@article{ 10.5120/ijca2017913554,
author = { Kirankumar B. Balavalad, B. G. Sheeparamatti, Veekshit B. Math },
title = { Design and Simulation of MEMS Capacitive Pressure Sensor Array for Wide Range Pressure Measurement },
journal = { International Journal of Computer Applications },
issue_date = { Apr 2017 },
volume = { 163 },
number = { 6 },
month = { Apr },
year = { 2017 },
issn = { 0975-8887 },
pages = { 39-46 },
numpages = {9},
url = { https://ijcaonline.org/archives/volume163/number6/27403-2017913554/ },
doi = { 10.5120/ijca2017913554 },
publisher = {Foundation of Computer Science (FCS), NY, USA},
address = {New York, USA}
}
%0 Journal Article
%1 2024-02-07T00:09:29.103959+05:30
%A Kirankumar B. Balavalad
%A B. G. Sheeparamatti
%A Veekshit B. Math
%T Design and Simulation of MEMS Capacitive Pressure Sensor Array for Wide Range Pressure Measurement
%J International Journal of Computer Applications
%@ 0975-8887
%V 163
%N 6
%P 39-46
%D 2017
%I Foundation of Computer Science (FCS), NY, USA
Abstract

The major breakthrough for future in MEMS is to integrate micro sensors, micro actuators and micro electronics and other technologies on a single chip. MEMS pressure sensor are the very first MEMS components that have emerged in the micro system world. MEMS pressure sensors are widely being adopted in many applications for their high performance, low cost and small size. This paper presents novel design of MEMS capacitive pressure sensor array. The proposed MEMS capacitive pressure sensor array is demonstrated with each sensor having diaphragm of side length 60µm and gap depth of 3µm but with different diaphragm thickness of viz., 1.5µm, 2µm, 2.5µm and 3µm. The linearity of each MEMS capacitive pressure sensor in the array is studied and the output within good linearity is read out using combinational switching mechanism available in COMSOL and MATLAB Simulink. This proposed work makes possible to measure pressure over a large range of about 0-33.25MPa and can be even varied by varying diaphragm thickness of each sensor in an array or by varying the number of array elements. Hence this design can possibly be called universal pressure sensor and can be used in variety of applications.

References
  1. Kirankumar B. Balavalad, B. G. Sheeparamatti, “A Critical Review on MEMS Capacitive Pressure Sensors”, Sensors & Transducers journal, IFSA publication, ISSN: 2306-8515, e-ISSN 1726-5479 Volume 187, Issue 4, pp-120-128, April 2015.
  2. Priya Singha Roy “A Simulation Based Geometrical Analysis of MEMS Capacitive Pressure Sensors for High Absolute Pressure Measurement”, Dept. of Applied Electronics and Instrumentation Engineering, IESA 2014.
  3. Priya Singha Roy, Madhurima Chattopadhyay, “Simulation of MEMS Based Capacitive Pressure Sensor Using Comsol Multiphysics”, Kurukshetra Institute of Technology & Management, Kurukshetra.
  4. Arash Sabet, Xavier J. Avula, “Sensitivity to Shape and Membrane Thickness Variations in Capacitive Pressure Sensors”, Department of Mechanical and Aerospace Engineering Washington University in St. Louis, Campus Box 1185, Jolley Hall 305.
  5. K. Y. Madhavi, M Krishna, “Diaphragm Design for MEMS Pressure Sensors using a Data Mining Tool”, World Congress on Engineering 2011 Vol II July 6 - 8, 2011.
  6. B. A. Ganji, M. Shams Nateri, “Modeling of Capacitance and Sensitivity of a MEMS Pressure Sensor with Clamped Square Diaphragm”, Department of Electrical & Computer Engineering, Babol University of Technology, Babol, Iran.
  7. Jithendra N Palasagaram and Ramesh Ramadoss, “MEMS Capacitive Pressure Sensor Array fabricated Using Printed Circuit Processing Techniques”, Department of Electrical and Computer Engineering, Auburn University.
  8. M.Z. Shaikh, Dr. S.F. Kodad, Dr. B.C. Jinaga, “A Comparative Performance Analysis Of Capacitive And Piezoresistive MEMS For Pressure Measurement”, International Journal Of Computer Science And Applications Vol. 1, No. 3, December 2008 ISSN 0974-1003.
  9. Shivam Kohli, Anish Saini, “MEMS BASED PRESSURE SENSOR SIMULATION FOR HEALTHCARE AND BIOMEDICAL APPLICATIONS”, International Journal of Engineering Sciences & Emerging Technologies, Dec. 2013. ISSN: 2231 – 6604.
  10. MEMS & NanoTechonology Lab, School of Mechanical Systems Engineering, Chonnam National University, Intelligent Machine Technology, KIMM.
  11. http://www.wrh.noaa.gov/slc/projects/wxcalc/formulas/pressureConversion.pdf
  12. Richard De Jongk, "MEMS Pressure Sensor Array for Aeroacoustic Analysis of the Turbulent Boundary Layer", Calvin College, Grand Rapids, MI, USA.
Index Terms

Computer Science
Information Sciences

Keywords

MEMS pressure sensor array Polysilicon Linearity Switching COMSOL Simulink Diaphragm thickness.

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